WafIR™ ATR Wafer Checker

The WafIR™ is a horizontal ATR accessory for analysis of monolayers and other thin coatings applied to one side of double-side polished wafers.  It features a 45° incident angle Si crystal to couple the light in and out of the wafers.  The WafIR incorporates a pressure applicator with pressure pads designed for optimal contact with minimal contact area and the contact area is outside the measured area.  The pressure applicator includes a slip-clutch to limit the total force applied to the sample and is compatible with a torque wrench for repeatability.  The WafIR is fully enclosed for rapid purging and is compatible with most FTIR spectrometers.

Features

• Unobstructed, horizontal sampling surface accommodates wafers from 52 x 10 mm up to 203 mm (8") in diameter.
• Non-contact sampling method; contact with the coupling crystal is outside the measured area.
• High sensitivity due to multiple reflections.
• Provides 33 reflections from the coated surface for a 0.770 mm thick wafer.
• Fixed 45° incident angle.
• Replaceable Si coupling crystal.
• Built-in slip-clutch limits the total force applied to the sample.
• Unique pressure applicator with pads for minimal contact with the sample.
• Easy to align and use.
• PermaPurge™ for rapid sample exchange without interrupting the purge.

Includes

• WafIR with Si coupling crystal.
• Mating hardware for the specified spectrometer.

Technical Info

Download WafIR™ Data Sheet (pdf)

Download WafIR™ Application Notes:

• An FTIR Comparison of Grazing Angle Ge ATR, Transmission and Coupled Multiple Reflection ATR for Studying Coated Si Wafers