WafIR™ ATR Wafer Checker

The WafIR™ is a horizontal ATR accessory for analysis of monolayers and other thin coatings applied to one side of double-side polished wafers.  It features a 45° incident angle Si crystal to couple the light in and out of the wafers.  The WafIR incorporates a pressure applicator with pressure pads designed for optimal contact with minimal contact area and the contact area is outside the measured area.  The pressure applicator includes a slip-clutch to limit the total force applied to the sample and is compatible with a torque wrench for repeatability.  The WafIR is fully enclosed for rapid purging and is compatible with most FTIR spectrometers.

Features & Includes


  • Unobstructed, horizontal sampling surface accommodates wafers from 52 x 10 mm up to 203 mm (8") in diameter.
  • Non-contact sampling method; contact with the coupling crystal is outside the measured area.
  • High sensitivity due to multiple reflections.
  • Provides 33 reflections from the coated surface for a 0.770 mm thick wafer.
  • Fixed 45° incident angle.
  • Replaceable Si coupling crystal.
  • Built-in slip-clutch limits the total force applied to the sample.
  • Unique pressure applicator with pads for minimal contact with the sample.
  • Easy to align and use.
  • PermaPurgeä for rapid sample exchange without interrupting the purge.


  • WafIR with Si coupling crystal.
  • Mating hardware for the specified spectrometer.

Related Accessories


Model No. Name Price
HWF-ATR-E WafIR™ Si Coupling Crystal

Technical Info

For assistance with your order, please contact customer service at 1-800-248-3847


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